Wafer support device

ABSTRACT

A wafer support device is provided. The wafer support device includes a plurality of support portions; and a bottom area located among the support portions, wherein the bottom area has a protective layer formed thereon. A method for processing a working surface of a wafer support device is also provided.

CROSS REFERENCE TO RELATED APPLICATION

This application is a Divisional application of U.S. Ser. No. 13/593,479filed Aug. 23, 2012, the subject matter of which is incorporated hereinby reference in its entirety.

FIELD

The present disclosure relates to a support device, and moreparticularly to a wafer support device.

BACKGROUND

The particles on the wafer backside have become one of the major defectsources for many generations of technologies. Due to the technology nodeadvancement, pitch shrinking, and an increasing number of processingsteps required, the reduction of the particles on the wafer backsidebecomes one of the keys for the yield performance.

The electrostatic chuck (ESC) is a device for supporting the wafer.Generally, the ESC includes a plurality of support portions forsupporting the wafer and a bottom area. When the ESC is manufactured,the surface of the bottom area is rough due to the material thereof.Such roughness is unable to be removed by the wet clean. When performingthe dry etching process, such roughness is easy to be wiped out by theplasma to become the particles contaminating the wafer backside.Besides, the polymers generated during the semiconductor processes mayfall on the bottom area of the ESC and be stuck in the rough surfacethereof. Accordingly, the generated polymers are hard to remove, andalso become the particles contaminating the wafer backside.

After the wafer is processed on the ESC, it will be returned to thefront opening unified pod (FOUP) for temporary storage and transmission.Generally, the FOUP stores a plurality of wafers, wherein a wafer'sbackside faces another wafer's front side. Therefore, when a wafer isreturned to the FOUP, if the backside of the wafer is contaminated byparticles, the particles will fall on the front side of another waferthereunder, thereby contaminating another wafer. Besides the problem ofthe particles on the wafer backside, the lifetime of the ESC will alsobe shortened due to the particle contamination. Hence, there is a needto solve the above problems.

SUMMARY

In accordance with one aspect of the present disclosure, a method forprocessing a working surface of a wafer support device is provided. Thewafer support device is to support a wafer and has a wafer-contactingsurface. The method includes steps of disposing a protective layer ontothe working surface, wherein the protective layer includes a specificportion covering the wafer-contacting surface; and removing the specificportion.

In accordance with another aspect of the present disclosure, a waferapparatus is provided. The wafer apparatus includes a wafer supportdevice having a working surface, and a wafer-contacting surface forsupporting thereon a wafer; a spray device spraying a protectivematerial onto the working surface to form a protective layer, whereinthe protective layer includes a specific portion covering thewafer-contacting surface; and a grind device grinding the specificportion after the spray device sprays the protective material onto theworking surface.

In accordance with one more aspect of the present disclosure, a wafersupport device is provided. The wafer support device includes aplurality of support portions; and a bottom area located among thesupport portions, wherein the bottom area has a protective layer formedthereon.

The above objects and advantages of the present invention will becomemore readily apparent to those ordinarily skilled in the art afterreviewing the following detailed descriptions and accompanying drawings,in which:

DESCRIPTION OF THE DRAWINGS

FIGS. 1(a) and 1(b) show a wafer apparatus according to variousembodiments of the present disclosure;

FIG. 2 shows a wafer being supported by the wafer support device of FIG.1(b);

FIG. 3 is a top view of the wafer support device of FIG. 1(b);

FIG. 4 shows a flowchart of a method for processing the working surfaceof the wafer support device of FIG. 1(b) according to variousembodiments of the present disclosure;

FIG. 5 shows a wafer support device according to various embodiments ofthe present disclosure;

FIG. 6 shows a wafer being supported by the wafer support device of FIG.5;

FIG. 7 is a top view of the wafer support device of FIG. 5; and

FIG. 8 shows a flowchart of a method for manufacturing the wafer supportdevice of FIG. 5 according to various embodiments of the presentdisclosure.

DETAILED DESCRIPTION

The present invention will be described with respect to particularembodiments and with reference to certain drawings, but the invention isnot limited thereto but is only limited by the claims. The drawingsdescribed are only schematic and are non-limiting. In the drawings, thesize of some of the elements may be exaggerated and not drawn to scalefor illustrative purposes. The dimensions and the relative dimensions donot necessarily correspond to actual reductions to practice.

Furthermore, the terms first, second and the like in the description andin the claims, are used for distinguishing between similar elements andnot necessarily for describing a sequence, either temporally, spatially,in ranking or in any other manner. It is to be understood that the termsso used are interchangeable under appropriate circumstances and that theembodiments described herein are capable of operation in other sequencesthan described or illustrated herein.

Moreover, the terms top, bottom, over, under and the like in thedescription and the claims are used for descriptive purposes and notnecessarily for describing relative positions. It is to be understoodthat the terms so used are interchangeable under appropriatecircumstances and that the embodiments described herein are capable ofoperation in other orientations than described or illustrated herein.

It is to be noticed that the term “comprising”, used in the claims,should not be interpreted as being restricted to the means listedthereafter; it does not exclude other elements or steps. It is thus tobe interpreted as specifying the presence of the stated features,integers, steps or components as referred to, but does not preclude thepresence or addition of one or more other features, integers, steps orcomponents, or groups thereof. Thus, the scope of the expression “adevice comprising means A and B” should not be limited to a deviceconsisted only of components A and B.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure or characteristicdescribed in connection with the embodiment is included in at least oneembodiment. Thus, appearances of the phrases “in one embodiment” or “inan embodiment” in various places throughout this specification are notnecessarily all referring to the same embodiment, but may. Furthermore,the particular features, structures or methods may be combined in anysuitable manner, as would be apparent to one of ordinary skill in theart from this disclosure, in one or more embodiments.

Similarly it should be appreciated that in the description of exemplaryembodiments, various features are sometimes grouped together in a singleembodiment, figure, or description thereof for the purpose ofstreamlining the disclosure and aiding in the understanding of one ormore of the various inventive aspects. This method of disclosure,however, is not to be interpreted as reflecting an intention that theclaimed invention requires more features than are expressly recited ineach claim. Rather, as the following claims reflect, inventive aspectslie in less than all features of a single foregoing disclosedembodiment. Thus, the claims following the detailed description arehereby expressly incorporated into this detailed description, with eachclaim standing on its own as a separate embodiment.

Furthermore, while some embodiments described herein include some butnot other features included in other embodiments, combinations offeatures of different embodiments are meant to be within the scope ofthe invention, and form different embodiments, as would be understood bythose in the art. For example, in the following claims, any of theclaimed embodiments can be used in any combination.

In the description provided herein, numerous specific details are setforth. However, it is understood that embodiments may be practicedwithout these specific details. In other instances, well-known methods,structures and techniques have not been shown in detail in order not toobscure an understanding of this description.

The invention will now be described by a detailed description of severalembodiments. It is clear that other embodiments can be configuredaccording to the knowledge of persons skilled in the art withoutdeparting from the true technical teaching of the present disclosure,the claimed invention being limited only by the terms of the appendedclaims.

FIGS. 1(a) and 1(b) show a wafer apparatus 10 according to variousembodiments of the present disclosure. The wafer apparatus 10 includes awafer support device 1, a spray device 2 and a grind device 3. The wafersupport device 1 has a working surface 14 and a wafer-contacting surface13. A plurality of support portions 11 and a bottom area 12 are locatedamong the support portions 11 of the wafer support device 1, as shown inFIG. 3, which is a top view of the wafer support device 1. The supportportions 11 may be cylindrical, for example. Each support portion 11 hasa top surface 111 and a lateral surface 112. The bottom area 12 has abottom surface 121. The working surface 14 of the wafer support device 1includes the top surface 111 and the lateral surface 112 of each supportportion 11 and the bottom surface 121 of the bottom area 12. Thewafer-contacting surface 13 of the wafer support device 1 includes thetop surface 111 of each support portion 11.

As shown in FIG. 1(a), the bottom surface 121 of the bottom area 12 hasroughness 15 before being processed by the technology of the presentdisclosure. In order to solve the problem caused by the roughness 15,the spray device 2 and the grind device 3 are provided in the presentdisclosure. Firstly, the spray device 2 sprays a protective materialonto the working surface 14 to form a protective layer 5, as shown inFIG. 1(a). The protective layer 5 covers the roughness 15 so that theroughness 15 is not exposed. The protective layer 5 includes a specificportion covering the wafer-contacting surface 13. Secondly, the grinddevice 3 grinds the specific portion, as shown in FIG. 1(b). Thirdly, acleaning process is performed to remove the residue of the protectivematerial left after the grinding process. After the above-mentionedsteps, a wafer 6 can be placed on the support portions 11 for subsequentsemiconductor processes without the contamination of the particlescaused by the roughness 15, as shown in FIG. 2.

In some embodiments, the height of each support portion can be 50 um,and the radius thereof can be 1 mm. In some embodiments, the pitchbetween the support portions 11 can be 4 mm.

In some embodiments, the protective material can be an anticorrosive andelectrically insulating material. The anticorrosive and electricallyinsulating material can be Y₂O₃, Al₂O₃, silicon, SiO₂ or a Teflon. TheTeflon may be polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), orfluorinated ethylene propylene (FEP). In some other embodiments, theprotective material can be any other type of material havinganticorrosive and electrically insulating properties.

In some embodiments, the thickness of the protective layer 5 can be 10um.

The purpose of spraying the protective material is to smooth the bottomsurface 121 of the bottom area 12. In this way, the bottom surface 121of the bottom area 12 becomes smooth and clean, so that the particlesare not generated when performing a dry etching process with a plasma.Accordingly, the backside of the wafer 6 is not contaminated by theparticles. Moreover, since the bottom surface 121 of the bottom area 12becomes smooth, it can be kept clean after the semiconductor processesby the plasma and wet clean. That is, the polymers generated in thesubsequent semiconductor processes can be removed easily by the plasmaand wet clean. Accordingly, the backside of the wafer 6 is notcontaminated by the polymers, either. Since the backside of the wafer 6is not contaminated by the particles and polymers, when the wafer 6 isreturned to the FOUP, the front side of another wafer (not shown) underthe wafer 6 is not contaminated by the particles and polymers, either.

The purpose of grinding the specific portion is to grind the protectivelayer 5 on the wafer-contacting surface 13, i.e. to grind the protectivelayer 5 on the top surface 111 of each support portion 11 to make itsmooth and even. The grind device 3 stops grinding while touching theceramic material of the top surface 111 of each support portion 11.Since the top surface 111 of each support portion 11 contacts the wafer6, if the protective layer 5 thereon is not grinded, the top surface 111might not be even enough for the wafer 6 to be firmly supported by thewafer support device 1. Hence, the step of grinding the specific portionis provided in the present disclosure to make sure that the wafer 6 canbe firmly supported by the wafer support device 1. The protective layer5 on the lateral surface 112 of each support portion 11 and that on thebottom surface 121 of the bottom area 12 are not grinded.

In some embodiments, the grind device 3 grinds the protective layer 5 onthe top surface 111 of each support portion 11 with a slurry.

In some embodiments, the wafer support device 1 can be an electrostaticchuck (ESC). The ESC can be a 300 mm ESC or a 450 mm ESC. In otherembodiments, the wafer support device 1 can be any other type of devicethat can support the wafer 6.

Please refer to FIGS. 1(a), 1(b) and 4 simultaneously. FIG. 4 shows aflowchart of a method for processing the working surface 13 of the wafersupport device 1 of FIG. 1(b) according to various embodiments of thepresent disclosure. The method includes the following steps. Theprotective layer 5 is disposed onto the working surface 14 of the wafersupport device 1 in step 41. The protective layer 5 includes a specificportion covering the wafer-contacting surface 13 of the wafer supportdevice 1. The specific portion is removed in step 42. The step ofdisposing the protective layer 5 includes a sub-step of spraying theprotective material onto the working surface 14 of the wafer supportdevice 1 to form the protective layer 5. The step of removing thespecific portion includes a sub-step of grinding the specific portion.The protective layer 5 on the lateral surface 112 of each supportportion 11 and that on the bottom surface 121 of the bottom area 12 arenot grinded.

In some embodiments, the method for processing the working surface 13 ofthe wafer support device 1 of the present disclosure is performed onlyonce after the wafer support device 1 is manufactured. After performingthe above-mentioned method, the wafer support device 1 can be used forseveral years. During these years, when the polymers are generated inthe subsequent semiconductor processes, they can be easily removed bythe plasma and wet clean. Accordingly, the backside of the wafer 6 willnot be contaminated by the polymers.

In some embodiments, the protective material can be an anticorrosive andelectrically insulating material. The anticorrosive and electricallyinsulating material can be Y₂O₃, Al₂O₃, silicon, SiO₂ or a Teflon. TheTeflon may be polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), orfluorinated ethylene propylene (FEP). In some other embodiments, theprotective material can be any other type of material that has theanticorrosive and electrically insulating properties.

In some embodiments, the thickness of the protective layer 5 can be 10um.

In some embodiments, the wafer support device 1 can be an electrostaticchuck (ESC). The ESC can be a 300 mm ESC or a 450 mm ESC. In some otherembodiments, the wafer support device 1 can be any other type of devicethat can support the wafer 6.

FIG. 5 shows a wafer support device 7 according to various embodimentsof the present disclosure. The wafer support device 7 has a workingsurface 74 and a wafer-contacting surface 73. The wafer support device 7includes a plurality of support portions 71 and a bottom area 72 locatedamong the support portions 71 as shown in FIG. 7, which is a top view ofthe wafer support device 7. The support portions 71 may be cylindrical,for example. Each support portion 71 has a top surface 711 and a lateralsurface 712. The bottom area 72 has a bottom surface 721. The workingsurface 74 of the wafer support device 7 includes the top surface 711and the lateral surface 712 of each support portion 71 and the bottomsurface 721 of the bottom area 72. The wafer-contacting surface 73 ofthe wafer support device 7 includes the top surface 711 of each supportportion 71.

The bottom area 72 has a protective layer 8 formed thereon. The lateralsurface 712 of each support portion 71 also has the protective layer 8formed thereon. A wafer 9 can be placed on the support portions 71 forsubsequent semiconductor processes, as shown in FIG. 6.

In some embodiments, the height of each support portion can be 50 um,and the radius thereof can be 1 mm. In some embodiments, the pitchbetween the support portions 11 can be 4 mm.

In some embodiments, the protective layer 8 includes a protectivematerial. The protective material can be an anticorrosive andelectrically insulating material. The anticorrosive and electricallyinsulating material can be Y₂O₃, Al₂O₃, silicon, SiO₂ or a Teflon. TheTeflon may be polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), orfluorinated ethylene propylene (FEP). In some other embodiments, theprotective material can be any other type of material having theanticorrosive and electrically insulating properties.

In some embodiments, the thickness of the protective layer 5 can be 10um.

With the protective layer 8, the bottom surface 721 of the bottom area72 are smooth and clean, so that the particles are not generated whenperforming the dry etching process with the plasma. Accordingly, thebackside of the wafer 9 is not contaminated by the particles. Moreover,since the bottom surface 721 of the bottom area 72 is smooth, it can bekept clean after the semiconductor processes by the plasma and wetclean. That is, the polymers generated in the subsequent semiconductorprocesses can be easily removed by the plasma and wet clean.Accordingly, the backside of the wafer 9 is not contaminated by thepolymers, either. Since the backside of the wafer 9 is not contaminatedby the particles and polymers, when the wafer 9 is returned to the FOUP,the front side of another wafer (not shown) under the wafer 9 is notcontaminated by the particles and polymers, either.

Since the top surface 711 of each support portion 71 contacts the wafer9, if it has the protective layer 8 formed thereon, it may not be evenenough for the wafer 9 to be firmly supported by the wafer supportdevice 7. Hence, to make sure that the wafer 9 can be firmly supportedby the wafer support device 7, the top surface 711 of each supportportion 71 has no protective layer 8 formed thereon.

In some embodiments, the wafer support device 7 can be an electrostaticchuck (ESC). The ESC can be a 300 mm ESC or a 450 mm ESC. In otherembodiments, the wafer support device 7 can be any other type of devicethat can support the wafer 9.

Please refer to FIGS. 5 and 8 simultaneously. FIG. 8 shows a flowchartof a method for manufacturing the wafer support device 7 of FIG. 5according to various embodiments of the present disclosure. The methodincludes the following steps. The wafer support device 7 is provided instep 81. The wafer support device 7 includes the plurality of supportportions 71 and the bottom area 72 located among the support portions71, and each of the support portions 71 has the top surface 711 and thelateral surface 712. The protective layer 8 is formed on the bottom area72 and the lateral surface 712 of each support portion 71 in step 82.

In some embodiments, the wafer support device 7 provided in step 81 canbe an electrostatic chuck (ESC). The ESC can be a 300 mm ESC or a 450 mmESC. In some other embodiments, the wafer support device 7 provided instep 81 can be any other type of device that can support the wafer 9.

In some embodiments, the height of each support portion can be 50 um,and the radius thereof can be 1 mm. In some embodiments, the pitchbetween the support portions 11 can be 4 mm.

In some embodiments, the protective layer 8 formed in step 82 includes aprotective material. The protective material can be an anticorrosive andelectrically insulating material. The anticorrosive and electricallyinsulating material can be Y₂O₃, Al₂O₃, silicon, SiO₂ or a Teflon. Insome other embodiments, the protective material can be any other type ofmaterial that has the anticorrosive and electrically insulatingproperties.

Based on the above, the present disclosure has the following advantages.The wafer backside particles and cross-contamination issues areeliminated in a simple, reliable and cost-effective way to increase theyield. The cross-contamination issue is generated when the wafer is intransit, at which time the wafer may contaminate other semiconductordevices due to the particles falling from the wafer backside. Hence, ifthe particles on the wafer backside can be eliminated, thecross-contamination issue can be avoided. Since the method of thepresent disclosure can effectively eliminate the particles on the waferbackside, the cross-contamination issue can be successfully avoided.

Since the color of the protective layer 5, 8 is different from that ofthe working surface 14, 74 of the wafer support device 1, 7, presence ofthe protective layer 5, 8 on the working surface 14, 74 of the wafersupport device 1, 7 is easily detected. For example, if the color of theprotective layer 5, 8 is white and that of the working surface 14, 74 ofthe wafer support device 1, 7 is gray, one can easily determine that theworking surface 14, 74 of the wafer support device 1, 7 is provided withthe protective layer 5, 8 due to the color difference. Then, one candetermine whether to perform the method of the present disclosure forthe wafer support device 1, 7 or not.

While the invention has been described in terms of what is presentlyconsidered to be the most practical and preferred embodiments, it is tobe understood that the invention needs not be limited to the disclosedembodiments. On the contrary, it is intended to cover variousmodifications and similar arrangements included within the spirit andscope of the appended claims which are to be accorded with the broadestinterpretation so as to encompass all such modifications and similarstructures.

What is claimed is:
 1. A wafer support device, comprising: a pluralityof support portions; and a bottom area located among the supportportions, wherein the bottom area has a protective layer formed thereon,wherein each of the plurality of support portions is arranged at equalintervals with respect to adjacent support portions, and wherein theplurality of support portions are arranged in parallel lines such thatthe plurality of support portions in adjacent lines are offset from eachother.
 2. The wafer support device as claimed in claim 1, wherein: thewafer support device is an electrostatic chuck.
 3. The wafer supportdevice as claimed in claim 1, wherein: the wafer support device has aworking surface and a wafer-contacting surface; each of the supportportions has a top surface and a lateral surface; the lateral surface ofeach support portion is provided with the protective layer; the bottomarea has a bottom surface; the working surface includes the top surfaceand the lateral surface of each support portion and the bottom surfaceof the bottom area; and the wafer-contacting surface includes the topsurface of each support portion.
 4. The wafer support device as claimedin claim 1, wherein the protective layer comprises a protectivematerial.
 5. The wafer support device as claimed in claim 4, wherein theprotective material comprises an anticorrosive and insulating material.6. The wafer support device as claimed in claim 5, wherein theanticorrosive and insulating material comprises one selected from thegroup consisting of Y₂O₃, Al₂O₃, silicon, SiO₂, and a Teflon.
 7. A waferprocessing apparatus, comprising: the wafer support device of claim 1,the wafer support device having a working surface, and awafer-contacting surface for supporting thereon a wafer; a spray deviceconfigured to spray a protective material onto the working surface toform a protective layer, wherein the protective layer includes aspecific portion covering the wafer-contacting surface; and a grinddevice configured to grind the specific portion after the spray devicesprays the protective material onto the working surface.
 8. The waferprocessing apparatus as claimed in claim 7, wherein: each of the supportportions has a top surface and a lateral surface; the bottom area has abottom surface; the working surface includes the top surface and thelateral surface of each support portion and the bottom surface of thebottom area; and the wafer-contacting surface includes the top surfaceof each support portion.
 9. The wafer processing apparatus as claimed inclaim 7, wherein: the wafer support device is an electrostatic chuck.10. The wafer processing apparatus as claimed in claim 7, wherein theprotective material comprises an anticorrosive and insulating materialselected from the group consisting of Y₂O₃, Al₂O₃, silicon, SiO₂, and aTeflon.
 11. A wafer support device, comprising: a plurality of supportportions; and a bottom area located among the support portions, whereinthe bottom area has a protective layer formed thereon, wherein each ofthe plurality of support portions is arranged at equal intervals withrespect to adjacent support portions, and wherein each of the pluralityof support portion is surrounded by six adjacent support portions. 12.The wafer support device as claimed in claim 11, wherein: the wafersupport device is an electrostatic chuck.
 13. The wafer support deviceas claimed in claim 11, wherein: the wafer support device has a workingsurface and a wafer-contacting surface; each of the support portions hasa top surface and a lateral surface; the lateral surface of each supportportion is provided with the protective layer; the bottom area has abottom surface; the working surface includes the top surface and thelateral surface of each support portion and the bottom surface of thebottom area; and the wafer-contacting surface includes the top surfaceof each support portion.
 14. The wafer support device as claimed inclaim 11, wherein the protective layer comprises a protective material.15. The wafer support device as claimed in claim 14, wherein theprotective material comprises an anticorrosive and insulating material.16. The wafer support device as claimed in claim 14, wherein theanticorrosive and insulating material comprises one selected from thegroup consisting of Y₂O₃, Al₂O₃, silicon, SiO₂, and a Teflon.
 17. Awafer processing apparatus, comprising: the wafer support device ofclaim 11, the wafer support device having a working surface, and awafer-contacting surface for supporting thereon a wafer; a spray deviceconfigured to spray a protective material onto the working surface toform a protective layer, wherein the protective layer includes aspecific portion covering the wafer-contacting surface; and a grinddevice configured to grind the specific portion after the spray devicesprays the protective material onto the working surface.
 18. The waferprocessing apparatus as claimed in claim 17, wherein: each of thesupport portions has a top surface and a lateral surface; the bottomarea has a bottom surface; the working surface includes the top surfaceand the lateral surface of each support portion and the bottom surfaceof the bottom area; and the wafer-contacting surface includes the topsurface of each support portion.
 19. The wafer processing apparatus asclaimed in claim 17, wherein: the wafer support device is anelectrostatic chuck.
 20. The wafer processing apparatus as claimed inclaim 17, wherein the protective material comprises an anticorrosive andinsulating material selected from the group consisting of Y₂O₃, Al₂O₃,silicon, SiO₂, and a Teflon.